PVcomB
PVD Perovskite Industrialization
For many years, several groups at HZB have been researching perovskite tandem solar cells, which work with two superimposed layers: usually a silicon layer and a perovskite layer, which are stacked on top of each other and both convert different color components of sunlight into energy. This makes it possible to achieve a significantly higher efficiency than with single junction solar cells.
For the industry-oriented institute PVcomB, our PVD Perovskite Industrialization Group developed, set up and operates the KOALA production line. The goal to scale up the technology to industrial wafers: we show perovskite/silicon tandem solar cells the way from the laboratory to production, thus closing the gap between research and industry.
We have named the cluster tool KOALA "Contact and absorber layers for large-area perovskite-based tandem solar cells using PVD deposition". The system enables us to deposit all layers needed for a fully functional top cell, the perovskite layer by evaporation and all the necessary contact layers. The special feature: All processes run fully automatically and reproducibly within the system, i.e. without vacuum breakage - and on an industry-relevant area of up to 166 x 166 mm² (M6 wafers). The KOALA PVD and sputtering system is large enough to reproduce industrial production and contributes to the development of new industry-related processes, materials and solar cells. KOALA was built and technologically implemented together with the industrial partners Von Ardenne and MBraun. The Lab hosts also a solution based scaling technology and basic dry sample cleaning equipment.
Technical data of the KOALA vacuum process tool:
- Evaporation of perovskite precursor materials (up to 5 sources) with in-situ analysis
- Evaporation of contact materials
- DC and pulsed DC-sputtering from 2+2 tube targets
- ALD SnOx and AlOx layer
- Analytics & Heat/Cool Chamber
- Mask handling and batch processing are all automated and on up to M6 wafer size.
Technical data of the KOALA wet chemistry scaling tool:
- Spin-on deposition of perovskite precursor solutions (up to 4 vials) with thermal management
- Spin coating of contact materials
- Wafer handling and batch processing are all automated and on up to M6 wafer sizee.
Responsible Persons
- Tool & Lab: Dr. Jona Kurpiers
- Sputtering Tool: Katja Mayer-Stillrich
- Sputtering Technology: Dr. Marlene Härtel
- Evaporation of Organic Materials: Dr. Arman M. Soufiani, Dr. Jona Kurpiers
- Evaporation of Perovskite Precursor Materials: Dr. Tobias Bertram, Dr. Arman M. Soufiani, Dr. Jona Kurpiers
- Solution based spin-coating: Hajar Moumine, Dr. Jona Kurpiers
