Temperature controlled spin coating process

The invention focuses on Peltier-elements being used in a countercurrent heat exchanger to eliminate the need for liquid media for heat transfer, ensures a small device footprint and precise regulation of your processing temperature. The medium to which the created temperature difference is transferred is the medium of your working environment: This can be either dry air, Nitrogen, or Argon. The tempered gas is then pushed into the chamber where you placed your substrate. If you don’t have a chamber in which the spin coating process takes places, a 3D-printed dome will make sure that your substrate is surrounded by the set temperature.

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